We designed our ALE/2 UV-LED Light Engine to replace conventional 2-to-5 kW mercury discharge lamps. Monospectral (i-line only, CWL 365 nm) and multispectral broadband (i-line, CWL 365 nm / h-line, CWL 405 nm / g-line, CWL 436 nm) output configurations are available to achieve intensities beyond 100 mW/cm2 on round and square 8″ or 12″ substrates.
Our UV-LED lithography light source ALE/2 pairs an exposure subsystem with a separate control subsystem. This compact UV-LED Exposure Subsystem integrates right into your litho tool.